Head, Nanoscience Constellation; Chair, CNSE Faculty Council; Professor of Nanoscience
Research areas: Nanomaterials, solid state physics, ion beam physics, particle solid state interactions
Degrees:
- Ph.D. 1965 Saha Institute of Nuclear Physics, Calcutta, India
- M.S. 1960 Banaras Hindu University, India
Positions held:
- Director, Ion Beam Laboratories, University at Albany
- Chair of Physics Department 1981-2003
- Associate Chair of Physics Department 1990-94
- Associate Professor University at Albany 1973-81
- Assistant Professor University at Albany 1970-73
- Associate Director, Heavy Ion Accelerator, Yale University 1966-70
Research Areas:
- Nanomaterials
- Solid State Physics
- Ion Beam Physics
- Particle Solid State Interactions
Awards at University at Albany:
- President's Award: Excellence in Academic Service (1984)
Current Research:
Professor Bakhru's research focuses on industrial applications of high-energy microbeams, surface modification and characterization of materials using ion beams. His lab also conducts nanomaterials analysis using state-of-the-art ion beams and micro-beam facilities at University at Albany. This includes RBS, channeling, various nuclear reactions for low mass elements including hydrogen, nitrogen, carbon, fluorine, and other low mass elemental profiling and high energy implantation of large (up to 8 inch) wafers.
External Web sites:
Publications:
Ryan M. Roth, Djordje Djukic, Yoo Seung Lee, Richard M. Osgood, Jr., Sasha Bakhru, Bryan Laulicht, Kathleen Dunn, Hassaram Bakhru, Liqi Wu, and Mengbing Huang
Compositional and structural changes in LiNbO3 following deep He+ ion implantation for film exfoliation
Appl. Phys. Lett. 89, 112906 (2006)
Yoo Seung Lee, Djordje Djukic, Ryan M. Roth, Robert Laibowitz, Tomoyuki Izuhara, Richard M. Osgood, Jr., Sasha Bakhru, Hassaram Bakhru, Weidong Si, and David Welch
Fabrication of patterned single-crystal SrTiO3 thin films by ion slicing and anodic bonding
Appl. Phys. Lett. 89, 122902 (2006)
B. Lovelace, H. Bakhru, A. W . Haberl and R. E. Beneson
Microbeam elastic recoil detection of Hydrogen and Deuterium in Transition metals
(2006) Nuclear Instruments and Methods in Physics Research B, In print
V. Dasgupta, N. Litombe, W. E. Bailey, and H. Bakhru
Ion implantation of rare-earth dopants in ferromagnetic thin films
J. Appl. Phys. 99, 08G312 (2006)
A. R. Adhikari, M. Huang and H. Bakhru, M. Chipara, C. Y. Ryu and P. M. Ajayan
Thermal property of regioregular poly(3-hexylthiophene)/nanotube composites using modified single-walled carbon nanotubes via ion irradiation
(2006) Nanotechnology, submitted
B. Lovelace, H. Bakhru, A. W . Haberl and R. E. Benenson
Microbeam analysis of Hydrogen near a crack tip in Titanium
(2006) Nuclear Instruments and Methods in Physics Research B, In print
Lakshmanan Vanamurthy, Arthur W. Harber, Hassaram Bakhru
Application of ion beams in the Depth profiling of nitrogen
(2006) Nuclear Instruments and Methods in Physics Research B, In print
Martin Koerdel, Arthur W. Harber, Hassaram Bakhru
Depth profiling of Boron using gamma rays from the 11B(p,gamma)12C Reaction
(2006) Nuclear Instruments and Methods in Physics Research B, In print
B. Lovelace, H. Bakhru, A. W . Haberl and R. E. Benenson
Polymer ERD standards and charge integration for low intensity He ion microbeams
(2006) Nuclear Instruments and Methods in Physics Research B, In print
Pei-I Wang; Juneja, J.S.; Murarka, S.P.; Lu, T.-M.; Jezewski, C.; Ghoshal, R.; Bakhru, H.
Stability of Cu on epoxy siloxane polymer under bias temperature stress
Journal of the Electrochemical Society, April 2006, vol.153, no.4, pp. G358-62
Ananta R. Adhikari, Mengbing Huang, and Hassaram Bakhru; Robert Vajtai; Chang Y. Ryu and Pulickel M. Ajayan
Stability of ion implanted single-walled carbon nanotubes: Thermogravimetric and Raman analysis
Journal of Applied Physics 100, 064315-20 (2006)
B. Lovelace, H. Bakhru, A. W . Haberl and R. E. Benenson
ERD simulation of composite materials using ITSPECT
(2006) Nuclear Instruments and Methods in Physics Research B, In print
A. R. Adhikari, M. B. Huang, C. Y. Ryu, P. M. Ajayan and H. Bakhru
Effects of MeV Ions on Thermal Stability of Single Walled Carbon Nanotubes
Materials Research Society Proceedings Vol. 887, 2006
A. R. Adhikari, M. B. Huang, H. Bakhru, S. Talapatra, P. M. Ajayan, C. Y. Ryu
Effects of proton irradiation on thermal stability of single-walled carbon nanotubes mat.
Nuclear Instruments and Methods in Physics Research B 245 (2006) 431-434
Ee, Y.C.; Juneja, J.S.; Pei-I Wang; Lu, T.-M.; Bakhru, H.; Chan, L.; Law, S.B.; Yong, C.; Chen, Z.; Xu, S.
Bias-temperature stability of Ti-Si-N-O films
Journal of the Electrochemical Society, May 2006, vol.153, no.5, pp. G470-4
Vanga, R., Levy, M., Hong, Y., Moon, K., Bakhru, S., and Bakhru, H.
Single-Crystal Relaxor Ferroelectric Piezoactuators with Interdigitated Electrodes
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, 1593-1599, Dec. 2004
Ye, D.-X.; Carrow, B.; Pimanpang, S.; Bakhru, H.; Eyck, G.A.T.; Wang, G.-C.; Lu, T.-M.
Evaluation of a novel Cu(I) precursor for chemical vapor deposition
Electrochemical and Solid-State Letters, July 2005, vol.8, no.7, pp. C85-8
Juneja, J.S.; Eyck, G.A.T.; Bakhru, H.; Lu, T.-M.
Pressure dependent parylene-N pore sealant penetration in porous low-? dielectrics
Journal of Vacuum Science & Technology B, Sept. 2005, vol.23, no.5, pp. 2232-5
Rane, M.V.; Efstathiadis, H.; Bakhru, H.; Rupich, M.W.; Li, X.; Zhang, W.; Kodenkandath, T.; Haldar, P.
Fluorine analysis and microstructural evolution in coated YBCO conductor deposited by metal trifluoroacetate process
IEEE Transactions on Applied Superconductivity, June 2005, vol.15, no.2, pt.3, pp. 2638-41
Roth, R.M.; Izuhara, T.; Espinola, R.L.; Djukic, D.; Osgood, R.M., Jr.; Bakhru, S.; Bakhru, H.
Integrable wide-free-spectral-range Fabry-Perot optical filters using free-standing LiNbO/sub 3/ thin films
Optics Letters, 1 May 2005, vol.30, no.9, pp. 994-6
Patel, Z.P.; Roy, A.N.U.; Bakhru, H.; Lu, T.-M.
Preliminary evaluation of interfacial stability of surface modified porous methyl silsesquioxane by ion implantation for copper metallization scheme
Thin Solid Films, 8 April 2005, vol.476, no.2, pp. 322-5
Djukic, D.; Izuhara, T.; Roth, R.M.; Osgood, R.M., Jr.; Bakhru, S.; Bakhru, H.
Extremely thin, single-crystal films of LiNbO/sub 3/ fabricated using localized He+ ion-implantation
In 2005 Conference on Lasers and Electro-Optics (CLEO) (IEEE Cat. No. 05TH8796), 2005, Vol. 1, pp. 229-31
Roy, A.N.U.; Patel, Z.P.; Bakhru, H.
First pass study of surface modified porous low-k by ion implantation for zero thickness barrier requirement of Cu/MSQ/Si stacks in copper metallization scheme
Edited by: Besser, P.R., McKerrow, A.J., Iacopi, F., Wong, C.P., Vlassak, J.J.
In Materials, Technology and Reliability of Advanced Interconnects-2005. Symposium (Materials Research Society Proceedings Vol.863), 2005, pp. 171-6
Jian Yu; Yinmin Wang; Haber, A.W.; Bakhru, H.; Jian-Qiang Lu; Gutmann, R.J.
Mechanisms of low-temperature Ti/Si-based wafer bonding
Edited by: Besser, P.R., McKerrow, A.J., Iacopi, F., Wong, C.P., Vlassak, J.J.
In Materials, Technology and Reliability of Advanced Interconnects-2005. Symposium (Materials Research Society Proceedings Vol.863), 2005, pp. 387-92
Roth, R.M.; Izuhara, T.; Djukic, D.; Osgood, R.M., Jr.; Bakhru, S.; Bakhru, H.
Integratable, wide free spectral range Fabry-Perot filters fabricated from freestanding LiNbO/sub 3/ thin-films
Edited by: Sawchuk, A.A.
In Conference on Lasers and Electro-Optics (CLEO), 2004, vol.2, 3 pp.
T. Izuhara, I.L. Gheorma, and R.M. Osgood, Jr., A.N.U. Roy, H. Bakhru, Y.M. Tesfu and M.E. Reeves
Single-crystal Barium Titanate Thin-films by Ion Slicing
App. Phys. Lett. 82, 616-618 (2003)
M. Levy, Y.K. Hong, S. Bakhru and H. Bakhru
Microscale Patterning of Mesoscopic PZN-PT Single Crystal Films by Crystal Ion Slicing and Laser-Induced Etching
Ferroelectr. Lett. 30 (1/2) (2003)
A.M. Radojevic, R.M. Osgood,Jr., A.N.U. Roy and H. Bakhru
Prepatterned Optical Circuits in Thin Ion-sliced Single-Crystal Films of LiNB03
Photon. Tech. Lett. 14, 322-324 (2002)
M. Levy, S. Ghimire, A.K. Bandyopadhyay, Y.K. Hong, K. Roon, S. Bakhru and H. Bakhru
PZN-PT Single-Crystal Thin Film Monomorph Actuator
Ferroelectr. Lett. 29(3-4), 29-40 (2002)
M. Levy, T. Izuhara, R.M. Osgood, Jr., R. Reeves, Y. Wang, A.N.U. Roy, H. Bakhru
Low-Loss Crystal Ion Sliced Single-Crystal Potassium Tantalate Films
Appl. Phys. Lett. 80, 1046-1048 (2002)
A.N.U. Roy, A. Mallikarjunan, A. Kumar, J. Fortin, R. Geer, K. Dovidenko, E. Lifshin, H. Bakhru
Modification of Low -k Materials for ULSI Multilevel Inter Implantation
proceeding, Spring 2002, B7.19
A.N.U. Roy, Z.P. Patel, A. Mallikar, T.M. Lu
Mechanical Enhancement of Nanoporous Low-k Films as Inter Implantation
MRS proceeding, Fall 2002, B5.3
E. Nickles, H. Bakhru, H.T. Ghiradella and A. Haberl
Industrial Applications of High Energy Microbeams
Nucl. Instr. & Meth. B99, 410 (1995)
Windover, D.; Barnat, E.; Summers, J.; Lu, T.-M; Kumar, A.; Bakhru, H.; Lee, S. L.
Fixed-angle, energy-dispersive X-ray reflectivity measurement of thin tantalum film thickness
Journal of Electronic Materials (2002), 31(8), 848-856
CODEN: JECMA5 ISSN:0361-5235 AN 2002:619992 CAPLUS (Copyright 2002 ACS)
Nickles, Elizabeth P.; Ghiradella, Helen; Bakhru, Hassaram; Haberl, Arthur
Egg of the Karner Blue butterfly (Lycaeides melissa samuelis): Morphology and elemental analysis
Journal of Morphology (2002), 251(2), 140-148
CODEN: JOMOAT ISSN:0362-2525 CAN 136:306906 AN 2002:128550 CAPLUS (Copyright 2002 ACS)
Kumar, A.; Bakhru, H.; Fortin, J. B.; Yang, G.-R.; Lu, T.-M; Jin, C.; Lee, W. W.
Thermal stability of xerogel films
Thin Solid Films (2001), 396(1,2), 5-8
CODEN: THSFAP ISSN:0040-6090 CAN 136:86531 AN 2001:887237 CAPLUS (Copyright 2002 ACS)
Radojevic, A. M.; Osgood, R. M., Jr.; Roy, A. N.; Bakhru, H.
Low-loss pre-patterned annealed proton exchanged optical circuits in ion-sliced single-crystal thin films of LiNbO3
Trends in Optics and Photonics (2001), 58 (Integrated Photonics Research), IWB2/1.-IWB2/3
CODEN: TOPRBS CAN 136:93188 AN 2001:838305 CAPLUS (Copyright 2002 ACS)
Rout, B.; Chose, S. K.; Mahapatra, D. P.; Dev, B. N.; Bakhru, H.; Haberl, A. W.
Status of ion microbeam facility at the Institute of Physics, Bhubaneswar, India
Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms (2001), 181 110-115
CODEN: NIMBEU ISSN:0168-583X CAN135:338513 AN 2001:672916 CAPLUS (Copyright 2002 ACS)
Liu, Ruibin; Guo, Ruyan; Bhalla, Amar S.; Cross, L. E.; Levy, M.; Osgood, R. M.; Kumar, A.; Bakhru, H.
Dielectric and pyroelectric properties of crystal ion sliced (CIS) LiNbO3 thin film
Ferroelectrics (2000), 248(1-4), 45-56
CODEN: FEROA8 ISSN:0015-0193 CAN 135:337592 AN 2001:655979 CAPLUS (Copyright 2002 ACS)
Osgood, Richard M., Jr.; Radojevic, Antonije M.; Levy, Miguel; Bakhru, Hassaram
Slicing dielectric crystals with ions: A new material processing technique for electronic and optoelectronic materials integration
AIP Conference Proceedings (2001), 576 (Applications of Accelerators in Research and Industry), 896-899
CODEN: APCPCS ISSN:0094-243X CAN 135:311577 AN 2001:623814 CAPLUS (Copyright 2002 ACS)
Rout, B.; Ghose, S. K.; Dey, S.; Mahapatra, D. P.; Dev, B. N.; Bakhru, H.; Haberl, A. W.
A high energy ion microbeam facility for material characterization
Solid State Physics, Proceedings of the DAE Solid State Physics Symposium, 42nd Kalpakkam, India, Dec. 20-24, 1999 (2000), Meeting Date 1999, 266-267
CODEN:69BDRY CAN 134:320208 AN 2001:274100 CAPLUS (Copyright 2002 ACS)
Rout, B.; Ghose, S. K.; Dey, S.; Mahapatra, D. P.; Dev, B. N.; Bakhru, H.; Haberl, A. W.
Development of an ion micro-beam facility at the institute of Physics, Bhubaneswar
Indian Journal of Pure and Applied Physics (2001), 39(1&2), 62-64
CODEN: IJOPAU ISSN:0019-5596 CAN 134:358386 AN 2001:256822 CAPLUS (Copyright 2002 ACS)
Rogojevic, Svetlana; Jain, Anurag; Wang, Feng; Gill, William N.; Wayner, Peter C., Jr.; Plawsky, Joel L.; Lu, Toh-Ming; Yang, Guang-Rong; Lanford, William A.; Kumar, Atul; Bakhru, Hassaram; Roy, Alok Nandini
Interactions between silicia xerogel and tantalum
Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures (2001), 19(2), 354-360
CODEN: JVTBD9 ISSN:0734-211X CAN 135:66713 AN 2001:249431 CAPLUS (Copyright 2002 ACS)
Harris, William; Le Tarte, Laurie; Bakhru, Hassaram; Gibson, Walter; Wu, Di; Geer, R. E.; Wollman, D. A.
Energy dispersive x-ray analysis using a microcalorimeter detector
AIP Conference Proceedings (2001), 550 (Characterization and Metrology for ULSI Technology), 412-415
CODEN: APCPCS ISSN:0094-243X CAN 135:116062 AN 2001:237425 CAPLUS (Copyright 2002 ACS)
Windover, D.; Barnet, E.; Summers, J.; Gribbin, C.; Lu, T.-M.; Kumar, A.; Bakhru, H.; Lee, S. L.
Development of an in-line X-ray reflectivity technique for metal film thickness measurement
AIP Conference Proceedings (2001), 550 (Characterization and Metrology for ULSI Technology), 243-248
CODEN: APCPCS ISSN:0994-243X CAN 134:359863 AN 2001:237410 CAPLUS (Copyright 2002 ACS)
Ariel, N.; Eizenberg, M.; Wang, Y.; Bakhru, H.
The interface of fluorinated amorphous carbon with copper metalization
Materials Science & Engineering, A: Structural Materials: Properties, Microstructure and Processing (2001), A302(1), 26-30
CODEN: MSAPE3 ISSN:0921-5093 CAN 134:274006 AN 2001:92457 CAPLUS (Copyright 2002 ACS)
Levy, M.; Osgood, R. M., Jr.; Bhalla, A. S.; Guo, R.; Cross, L. E.; Kumar, A.; Sankaran, S.; Bakhru, H.
Stress tuning in crystal ion slicing to form single-crystal potassium tantalate films
Applied Physics Letters (2000), 77(14), 2124-2126
CODEN: APPLAB ISSN:003-6951 CAN 133:357921 AN 2000:692332 CAPLUS (Copyright 2002 ACS)
Mallikarjunan, A.; Murarka, S. P.; Steinbruchel, C.; Kumar, A.; Bakhru, H.
Electrical behavior of Cu thin fluorinated PECVD oxide MIS capacitors
Journal of the Electrochemical Society (2000), 147(9), 3502-3507
CODEN: JESOAN ISSN:0013-4651 CAN 133:316056 AN 2000:646859 CAPLUS (Copyright 2002 ACS)
Levy, M.; Osgood, R. M., Jr.; Rachford, F. J.; Kumar, A.; Bakhru, H.
Narrow-linewidth yttrium iron garnet films for heterogeneous integration
Materials Research Society Symposium Proceedings (2000), 603 (Materials Issues for Tunable RF and Microwave Devices), 119-122
CODEN: MRSPDH ISSN:0272-9172 CAN 133:290118 AN 2000:610159 CAPLUS (Copyright 2002 ACS)
Radojevic, A. M.; Levy, M.; Osgood, R. M., Jr.; Jundt, D. H.; Kumar, A.; Bakhru, H.
Second-order optical nonlinearity of 10-um-thick periodically poled LiNbO3 films
Optics Letters (2000), 25(14), 1034-1036
CODEN: OPLEDP ISSN:0146-9592 CAN 133:288466 AN 2000:562046 CAPLUS (Copyright 2002 ACS)
Windover, D.; Barnat, E; Kim, J. Y.; Nielsen, M.; Lu, T.-M.; Kumar, A.; Bakhru, H.; Jin, C.; Lee, S. L.
Thin film density determination by multiple radiation energy dispersive x-ray reflectivity
Advances in X-Ray Analysis (2000), 42 590-600
CODEN: AXRAAA ISN:0376-0308 CAN 133:66126 AN 2000:346031 CAPLUS (Copyright 2002 ACS)
Rachford, F. J.; Levy, M.; Osgood, R. M., Jr.; Kumar, A.; Bakhru, H.
Magnetization and FMR studies of crystal-ion sliced narrow linewidth gallium-doped yttrium iron garnet
Journal of Applied Physics (2000), 87(9, Pt. 3), 6253-6255
CODEN: JAPIAU ISSN:0021-8979 CAN 133:11935 AN 2000:315808 CAPLUS (Copyright 2002 ACS)
Kumar, A.; Bakhru, H.; Jin, C.; Lee, W. W.; Lu, T.-M.
Metal diffusion barriers for porous SiO2
Journal of Applied Physics (2000), 87(7), 3567-3569
CODEN: JAPIAU ISSN:0021-8979 CAN 132:258637 AN 2000:179104 CAPLUS (Copyright 2002 ACS)
DelaRosa, M.; Kumar, A.; Bakhru, H.; Lu, T.-M
Diffusion barriers for fluorinated low-k dielectrics
Materials Research Society Symposium Proceedings (1999), 565 (Low-Dielectric Constant Materials V), 197-202
CODEN: MRSPDH ISSN:0272-9172 CAN 132:188302 AN 2000:81265 CAPLUS (Copyright 2002 ACS)
Windover, D.; Lu, T.-M.; Lee, S. L.; Kumar, A.; Bakhru, H.; Jin, C.; Lee, W.
Energy-dispersive x-ray reflectivity density measurements of porous SiO2 xerogels
Applied Physics Letters (2000), 76(2), 158-160
CODEN: APPLAB ISSN:0003-6951 CAN 132:129520 AN 2000:21181 CAPLUS (Copyright 2002 ACS)
DelaRosa, M.; Kumar, A.; Bakhru, H.; Lu, T.-M.
Diffusion barriers for fluorinated low-k dielectrics
Materials Research Society Symposium Proceedings (1999), 564 (Advanced Interconnects and Contacts), 559-564
CODEN: MRSPDH ISSN:0272-9172 CAN 132:29264 AN 1999:687713 CAPLUS (Copyright 2002 ACS)
Kumar, A.; Bakhru, H.; Wang, B.; Yang, G.-R.; Fortin, J.; McDonald, J.; Lu, T.-M.
Study of fluorine diffusion in metalized polymers using ion beam techniques
Materials Chemistry and Physics (1999), 59(2), 136-138
CODEN: MCHPDR ISSN:0254-0584 CAN 131:145167 AN 1999:311606 CAPLUS (Copyright 2002 ACS)
Radojevic, A. M.; Levy, M.; Osgood, R. M., Jr.; Kumar, A.; Bakhru, H.; Tian, C.; Evans, C.
Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal LiNbO3 films
Applied Physics Letters (1999), 74(21), 3197-3199
CODEN: APPLAB ISSN:0003-6951 CAN 131:95795 AN 1999:303419 CAPLUS (Copyright 2002 ACS)
Rachford, F. J.; Levy, M.; Osgood, R. M., Jr.; Kumar, A.; Bakhru, H.
Magnetization and ferromagnetic resonance studies in implanted and crystal ion sliced bismuth-substituted yttrium iron garnet films
Journal of Applied Physics (1999), 85 (8, Pt. 2A), 5217-5219
CODEN: JAPIAU ISSN:0021-8979 CAN 131:12596 AN 1999:263794 CAPLUS (Copyright 2002 ACS)
A.M. Radojevic, R.M. Osgood, Jr., N.A. Roy and H. Bakhru
Pre-Patterned Optical Circuits in Thin Ion-Sliced Single-Crystal Films of LiNB03
IEEE Photonic Technology Letters (2002)
N.Ariel, M. Eizenberg, Y. Wang and H. Bakhru
The interface of flurinated amorphous carbon with copper metallization
Materials Science and Engineering, A302, 26 (2001)
W.A. Hennessy, M. Ghezzo, R.H. Wilson, H. Bakhru
Selective CVD Tungsten on silicon implanted Si02
Jr. of Electrochemical Soc. (in press)
H.Q. Lu, I.B. Bhat, A. Kumar, H. Bakhru, G.R. Yang, T.M. Lu, C. Jin
Investigation of moisture absorption in xerogel films by infrared spectrocopy and nuclear reaction analysis techniques
Thin Solid Films (to be published) 2001
M.C. Nielsen, J.Y. Kim, E.J. Rymaszewski, T.M.Lu, A.Kumar and H. Bakhru
Composite and multilayered Ta0x-Ti0y high dielectric constant thin films
IEEE (to be published)
A.M. Radojevic, M. Levy, X.J. Shen, R.M. Osgood, D.H. Jundt and H. Bakhru
Epitaxial liftoff and Second-Order Nonlinear Response of 10-um-thick Periodically Poled Lithium Niobate Films
Submitted for CLEO 2000, May 2000, San Francisco, CA
A. Kumar, H. Bakhru, C. Jin, W. Lee, T.M. Lu
Barrier materials for porous Si02
Appl. Phys. Vol 87, no. 7, p. 3567-9, 2000
